HOME
RESEARCH
MEMBERS
PUBLICATIONS
FACILITIES
NEWS
More
Photolithography System
Sputter
High Temperature Furnace
Electron Beam Evaporator
Rapid Thermal Annealing
Electron Beam Evaporator 2
Furnace
MOCVD
Thermal CVD 1
Thermal CVD 2
Optical Microscopy
UV Enhanced OM
Gas Chromatography
Ellipsometer
Probe Station
Angle Reflectivity Meas.
Chamber Probe Station